Inventor · disambiguated record
Kazuhito Outsuka
Also filed as: OUTSUKA KAZUHITO
5 granted patents·248 citations·filing 1987–2003
83Inventor score
Files withCANON KK5
Top patents by PatentIndex Score
5 records- 0197US4814829AProjection exposure apparatusCANON KK·Filed 1987·Granted Mar 21, 1989·162 cites·43 claims
- 0282US5925887AProjection exposure apparatus including an optical characteristic detector for detecting a change in optical characteristic of a projection optical system and device manufacturing method using the sameCANON KK·Filed 1997·Granted Jul 20, 1999·50 cites·43 claims
- 0366US6608667B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2001·Granted Aug 19, 2003·9 cites·37 claims
- 0455US6909372B2Power monitoring unit, control method therefor, and exposure apparatusCANON KK·Filed 2003·Granted Jun 21, 2005·7 cites·17 claims
- 0553US6714691B2Exposure method and apparatus, and device manufacturing method using the sameCANON KK·Filed 1999·Granted Mar 30, 2004·20 cites·21 claims
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