Inventor · disambiguated record

Kazuya Ichiki

Also filed as: ICHIKI KAZUYA

2 granted patents·3 citations·filing 2017–2021

39Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD2

Top patents by PatentIndex Score

2 records

0176US10115586B2Method for depositing a planarization layer using polymerization chemical vapor depositionTOKYO ELECTRON LTD·Filed 2017·Granted Oct 30, 2018·3 cites·20 claims
0255US12051571B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2021·Granted Jul 30, 2024·0 cites·9 claims

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →