Inventor · disambiguated record
Meliha Gozde Rainville
Also filed as: RAINVILLE MELIHA GOZDE
10 granted patents·64 citations·filing 2016–2020
87Inventor score
Files withLAM RES CORP10
Top patents by PatentIndex Score
10 records- 0197US10665501B2Deposition of Aluminum oxide etch stop layersLAM RES CORP·Filed 2017·Granted May 26, 2020·22 cites·16 claims
- 0296US9859153B1Deposition of aluminum oxide etch stop layersLAM RES CORP·Filed 2016·Granted Jan 2, 2018·19 cites·20 claims
- 0394US10559461B2Selective deposition with atomic layer etch resetLAM RES CORP·Filed 2017·Granted Feb 11, 2020·10 cites·7 claims
- 0486US10049869B2Composite dielectric interface layers for interconnect structuresLAM RES CORP·Filed 2016·Granted Aug 14, 2018·4 cites·11 claims
- 0584US10472716B1Showerhead with air-gapped plenums and overhead isolation gas distributorLAM RES CORP·Filed 2018·Granted Nov 12, 2019·4 cites·20 claims
- 0684US10418236B2Composite dielectric interface layers for interconnect structuresLAM RES CORP·Filed 2018·Granted Sep 17, 2019·3 cites·20 claims
- 0781US10998187B2Selective deposition with atomic layer etch resetLAM RES CORP·Filed 2019·Granted May 4, 2021·2 cites·9 claims
- 0869US10804144B2Deposition of aluminum oxide etch stop layersLAM RES CORP·Filed 2020·Granted Oct 13, 2020·0 cites·14 claims
- 0957US10745806B2Showerhead with air-gapped plenums and overhead isolation gas distributorLAM RES CORP·Filed 2019·Granted Aug 18, 2020·0 cites·20 claims
- 1039US10651080B2Oxidizing treatment of aluminum nitride films in semiconductor device manufacturingLAM RES CORP·Filed 2016·Granted May 12, 2020·0 cites·17 claims
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