Inventor · disambiguated record
Taiki Katou
Also filed as: KATOU TAIKI
3 granted patents·8 citations·filing 2014–2017
59Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0184US9926624B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Mar 27, 2018·5 cites·7 claims
- 0272US9390933B2Etching method, storage medium and etching apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jul 12, 2016·3 cites·11 claims
- 0348US11041239B2Film forming method for SiC filmTOKYO ELECTRON LTD·Filed 2017·Granted Jun 22, 2021·0 cites·2 claims
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