Inventor · disambiguated record
Ulrich Kirst
Also filed as: KIRST ULRICH
2 granted patents·2 pending applications·20 citations·filing 2004–2006
59Inventor score
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4 records- 0182US7749930B2Holder made from quartz glass for the processing of semiconductor wafers and method for production of the holderHERAEUS QUARZGLAS·Filed 2006·Granted Jul 6, 2010·7 cites·17 claims
- 0272US7637126B2Method for the production of laser-active quartz glass and use thereofHERAEUS QUARZGLAS·Filed 2004·Granted Dec 29, 2009·13 cites·18 claims
- 0340US2008193715A1Process For Producing a Quartz Glass Component For Use In Semiconductor Manufacture And Component Produced By This ProcessHERAEUS QUARZGLAS GMGH & CO KG·Filed 2006·Application pending·0 cites
- 0436US2008075949A1Coated Component Consisting of Quartz Glass, and Method for Producing Said ComponentHERAEUS QUARZGLAS GMH & CO KG·Filed 2005·Application pending·0 cites
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