Inventor · disambiguated record
Alek Owczarz
Also filed as: OWCZARZ ALEK
3 granted patents·1 pending application·47 citations·filing 2000–2004
72Inventor score
Technology areasB24B
Files withLAM RES CORP3
Top patents by PatentIndex Score
4 records- 0186US6607425B1Pressurized membrane platen design for improving performance in CMP applicationsLAM RES CORP·Filed 2000·Granted Aug 19, 2003·31 cites·29 claims
- 0270US6776695B2Platen design for improving edge performance in CMP applicationsLAM RES CORP·Filed 2000·Granted Aug 17, 2004·11 cites·18 claims
- 0357US6913521B2Methods using active retainer rings for improving edge performance in CMP applicationsLAM RES CORP·Filed 2004·Granted Jul 5, 2005·5 cites·18 claims
- 0432US2002081945A1Piezoelectric platen design for improving performance in CMP applicationsFiled 2000·Application pending·0 cites
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