Inventor · disambiguated record
Thomai Zacharopoulou
Also filed as: ZACHAROPOULOU THOMAI
3 granted patents·1 citations·filing 2018–2021
50Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0175US11531274B2Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targetsASML NETHERLANDS BV·Filed 2020·Granted Dec 20, 2022·1 cites·14 claims
- 0266US11604419B2Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targetsASML NETHERLANDS BV·Filed 2021·Granted Mar 14, 2023·0 cites·20 claims
- 0356US11022897B2Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targetsASML NETHERLANDS BV·Filed 2018·Granted Jun 1, 2021·0 cites·20 claims
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