Inventor · disambiguated record
Frans Reinier Spiering
Also filed as: SPIERING FRANS REINIER
2 granted patents·3 pending applications·0 citations·filing 2018–2022
28Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV5
Top patents by PatentIndex Score
5 records- 0169US11520238B2Optimizing an apparatus for multi-stage processing of product unitsASML NETHERLANDS BV·Filed 2021·Granted Dec 6, 2022·0 cites·20 claims
- 0256US11150562B2Optimizing an apparatus for multi-stage processing of product unitsASML NETHERLANDS BV·Filed 2018·Granted Oct 19, 2021·0 cites·20 claims
- 0353US2024152059A1A method for modeling measurement data over a substrate area and associated apparatusesASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0444US2024118629A1Methods of fitting measurement data to a model and modeling a performance parameter distribution and associated apparatusesASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
- 0543US2022291593A1Method and apparatus for lithographic process performance determinationASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
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