Inventor · disambiguated record

Yuqiang Tu

Also filed as: TU YUQIANG

2 granted patents·2 citations·filing 2015–2017

40Inventor score

Technology areasG01J

Files withBENCHMARK TECH2

Top patents by PatentIndex Score

2 records

0168US9631979B2Phase-shift reticle for characterizing a beamBENCHMARK TECH·Filed 2015·Granted Apr 25, 2017·2 cites·17 claims
0247US9921109B2Polarization-characterizing methods using phase-shifting targetsBENCHMARK TECH·Filed 2017·Granted Mar 20, 2018·0 cites·7 claims

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