Inventor · disambiguated record
Junnosuke Maki
Also filed as: MAKI JUNNOSUKE
6 granted patents·4 pending applications·12 citations·filing 2011–2024
73Inventor score
Technology areasH10P
Top patents by PatentIndex Score
10 records- 0191US11920240B2Substrate processing apparatus, state determination method and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2021·Granted Mar 5, 2024·2 cites·15 claims
- 0280US9030656B2Inspection device, inspection method and non-transitory storage medium for inspecting deformation of substrate holding member, and substrate processing system including the inspection deviceKAJIWARA HIDEKI·Filed 2011·Granted May 12, 2015·8 cites·20 claims
- 0370US2024175131A1State determination method and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0469US8707805B2Transfer apparatus and transfer methodTOKYO ELECTRON LTD·Filed 2012·Granted Apr 29, 2014·2 cites·11 claims
- 0559US2024385538A1Information collection system, inspection substrate, and information collection methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0651US2023187247A1Detection system, detection method, and storage mediumTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0750US12431374B2Information acquisition system and information acquisition methodTOKYO ELECTRON LTD·Filed 2022·Granted Sep 30, 2025·0 cites·11 claims
- 0849US2022319893A1Information acquisition system for substrate processing apparatus, arithmetic device, and information acquisition method for substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0938US12176227B2State determination device, state determination method, and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2020·Granted Dec 24, 2024·0 cites·15 claims
- 1035US11201068B2Heat treatment apparatus, method of managing heat treatment apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2018·Granted Dec 14, 2021·0 cites·13 claims
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