Inventor
DITIZIO ROBERT A
US6 patents
⚠️ This page may combine multiple inventors who share the name “DITIZIO ROBERT A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEGAL CORP
5 patentsUS6006694ADec 28, 1999
Plasma reactor with a deposition shield
TEGAL CORP60 citations95
US6521081B2Feb 18, 2003
Deposition shield for a plasma reactor
TEGAL CORP9 citations72
US6360686B1Mar 26, 2002
Plasma reactor with a deposition shield
TEGAL CORP6 citations72
US6173674B1Jan 16, 2001
Plasma reactor with a deposition shield
TEGAL CORP9 citations72
US6170431B1Jan 9, 2001
Plasma reactor with a deposition shield
TEGAL CORP10 citations72