Inventor · disambiguated record
Yuka Nakasato
Also filed as: NAKASATO YUKA
4 granted patents·4 pending applications·2 citations·filing 2018–2025
56Inventor score
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0188US11526160B2Failure detection system and failure detection methodTOKYO ELECTRON LTD·Filed 2020·Granted Dec 13, 2022·2 cites·17 claims
- 0263US2025321568A1Information processing apparatus, information processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0358US2025014925A1Information processing apparatus, abnormality detection method, and semiconductor manufacturing systemTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0450US2019136994A1Relief valve and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 0541US12334374B2Abnormality detecting apparatus, semiconductor manufacturing apparatus, and abnormality detecting methodTOKYO ELECTRON LTD·Filed 2021·Granted Jun 17, 2025·0 cites·9 claims
- 0641US2022018790A1Abnormality detecting method and abnormality detecting apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 0738US11492702B2Film-forming apparatus and film-forming methodTOKYO ELECTRON LTD·Filed 2018·Granted Nov 8, 2022·0 cites·10 claims
- 0838US10731255B2Film forming methodTOKYO ELECTRON LTD·Filed 2018·Granted Aug 4, 2020·0 cites·6 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →