Inventor · disambiguated record
Ramidin Izair Kamidi
Also filed as: KAMIDI RAMIDIN IZAIR
13 granted patents·35 citations·filing 2005–2020
88Inventor score
Top patents by PatentIndex Score
13 records- 0189US7782446B2Stage system and lithographic apparatus comprising such stage systemASML NETHERLANDS BV·Filed 2007·Granted Aug 24, 2010·13 cites·31 claims
- 0277US9927721B2Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Mar 27, 2018·2 cites·20 claims
- 0375US7576832B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Aug 18, 2009·5 cites·18 claims
- 0472US7657334B2Lithographic apparatus and control methodASML NETHERLANDS BV·Filed 2005·Granted Feb 2, 2010·3 cites·11 claims
- 0570US8928860B2Lithographic apparatus having a chuck with a visco-elastic damping layerHEMPENIUS PETER PAUL·Filed 2009·Granted Jan 6, 2015·4 cites·25 claims
- 0670US8014881B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Sep 6, 2011·3 cites·27 claims
- 0763US9715182B2Lithographic apparatus, substrate support system, device manufacturing method and control programASML NETHERLANDS BV·Filed 2013·Granted Jul 25, 2017·1 cites·21 claims
- 0859US8279407B2Stage system and lithographic apparatus comprising such stage systemKAMIDI RAMIDIN IZAIR·Filed 2009·Granted Oct 2, 2012·1 cites·20 claims
- 0957US8854607B2Controller, lithographic apparatus, method of controlling the position of an object and device manufacturing methodKAMIDI RAMIDIN IZAIR·Filed 2011·Granted Oct 7, 2014·1 cites·15 claims
- 1057US7453228B2Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning deviceASML NETHERLANDS BV·Filed 2006·Granted Nov 18, 2008·2 cites·16 claims
- 1153US11774865B2Method of controlling a position of a first object relative to a second object, control unit, lithographic apparatus and apparatusASML NETHERLANDS BV·Filed 2020·Granted Oct 3, 2023·0 cites·20 claims
- 1241US10120293B2Object positioning in lithographyASML NETHERLANDS BV·Filed 2014·Granted Nov 6, 2018·0 cites·20 claims
- 1337US8830442B2Servo control system, lithographic apparatus and control methodDE VOS YOUSSEF KAREL MARIA·Filed 2008·Granted Sep 9, 2014·0 cites·17 claims
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