Inventor · disambiguated record
Roger Y. B. Young
Also filed as: YOUNG ROGER · YOUNG ROGER Y B
5 granted patents·90 citations·filing 2001–2004
82Inventor score
Top patents by PatentIndex Score
5 records- 0188US6495312B1Method and apparatus for removing photoresist edge beads from thin film substratesLSI LOGIC CORP·Filed 2001·Granted Dec 17, 2002·30 cites·11 claims
- 0281US7968859B2Wafer edge defect inspection using captured image analysisLSI CORP·Filed 2003·Granted Jun 28, 2011·27 cites·10 claims
- 0377US6614507B2Apparatus for removing photoresist edge beads from thin film substratesLSI LOGIC CORP·Filed 2002·Granted Sep 2, 2003·14 cites·16 claims
- 0469US6767692B1Process for inhibiting edge peeling of coating on semiconductor substrate during formation of integrated circuit structure thereonLSI LOGIC CORP·Filed 2001·Granted Jul 27, 2004·11 cites·12 claims
- 0561US7183181B2Dynamic edge bead removalLSI LOGIC CORP·Filed 2004·Granted Feb 27, 2007·8 cites·21 claims
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