Inventor · disambiguated record
Seonkyung Lee
Also filed as: LEE SEONKYUNG
10 granted patents·1 pending application·23 citations·filing 2008–2025
83Inventor score
Top patents by PatentIndex Score
11 records- 0192US9627186B2System, method and apparatus for using optical data to monitor RF generator operationsLAM RES CORP·Filed 2014·Granted Apr 18, 2017·14 cites·15 claims
- 0288US9735069B2Method and apparatus for determining process rateLAM RES CORP·Filed 2015·Granted Aug 15, 2017·5 cites·13 claims
- 0380US10325760B2System, method and apparatus for using optical data to monitor RF generator operationsLAM RES CORP·Filed 2017·Granted Jun 18, 2019·2 cites·20 claims
- 0475US2025298392A1Large spot spectral sensing to control spatial setpointsLAM RES CORP·Filed 2025·Application pending·0 cites
- 0571US12360510B2Large spot spectral sensing to control spatial setpointsLAM RES CORP·Filed 2022·Granted Jul 15, 2025·0 cites·30 claims
- 0664US9752981B2Apparatus with a spectral reflectometer for processing substratesLAM RES CORP·Filed 2016·Granted Sep 5, 2017·1 cites·17 claims
- 0755US8432949B2High-power, high-throughput microwave discharge singlet oxygen generator for advanced electrical oxygen-iodine lasersRAWLINS W TERRY·Filed 2010·Granted Apr 30, 2013·1 cites·21 claims
- 0852US9036676B2Catalytic generation of metastable singlet oxygenPHYSICAL SCIENCES INC·Filed 2014·Granted May 19, 2015·0 cites·6 claims
- 0951US11056322B2Method and apparatus for determining process rateLAM RES CORP·Filed 2017·Granted Jul 6, 2021·0 cites·9 claims
- 1049US8670475B2Catalytic generation of metastable singlet oxygenRAWLINS W TERRY·Filed 2009·Granted Mar 11, 2014·0 cites·14 claims
- 1149US7817699B2High-power, high-throughput microwave discharge singlet oxygen generator for advanced electrical oxygen-iodine lasersPHYSICAL SCIENCES INC·Filed 2008·Granted Oct 19, 2010·0 cites·20 claims
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