Inventor · disambiguated record
Hiroaki Nakarai
Also filed as: NAKARAI HIROAKI
5 granted patents·2 pending applications·8 citations·filing 2011–2021
70Inventor score
Top patents by PatentIndex Score
7 records- 0171US9301379B2Extreme ultraviolet light generation apparatusWATANABE YUKIO·Filed 2012·Granted Mar 29, 2016·3 cites·23 claims
- 0269US8885680B2Laser apparatus, extreme ultraviolet light generation system, and method for generating laser beamNAKARAI HIROAKI·Filed 2012·Granted Nov 11, 2014·4 cites·13 claims
- 0366US9373926B2Laser chamber and discharge excitation gas laser apparatusGIGAPHOTON INC·Filed 2015·Granted Jun 21, 2016·1 cites·16 claims
- 0455US11778721B2Extreme ultraviolet light generation system and electronic device manufacturing methodGIGAPHOTON INC·Filed 2021·Granted Oct 3, 2023·0 cites·20 claims
- 0551US9894743B2Extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2015·Granted Feb 13, 2018·0 cites·22 claims
- 0640US2014098830A1Extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2013·Application pending·0 cites
- 0736US2011309270A1Laser device, extreme ultraviolet light generation device, and method for maintaining the devicesYAMANOUCHI YOHICHI·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →