Inventor · disambiguated record
Harunobu Sakuma
Also filed as: SAKUMA HARUNOBU
6 granted patents·5 pending applications·306 citations·filing 1996–2015
83Inventor score
Top patents by PatentIndex Score
11 records- 0196US6875280B2Substrate processing apparatus and substrate processing methodHITACHI INT ELECTRIC INC·Filed 2001·Granted Apr 5, 2005·199 cites·10 claims
- 0286US9190299B2Apparatus for manufacturing semiconductor device, method of manufacturing semiconductor device, and recording mediumHITACHI INT ELECTRIC INC·Filed 2014·Granted Nov 17, 2015·7 cites·14 claims
- 0385US5795452ADry process systemKOKUSAI ELECTRIC CO LTD·Filed 1996·Granted Aug 18, 1998·95 cites·17 claims
- 0481US7943528B2Substrate processing apparatus and semiconductor devices manufacturing methodHITACHI INT ELECTRIC INC·Filed 2010·Granted May 17, 2011·2 cites·13 claims
- 0580US9587313B2Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2015·Granted Mar 7, 2017·3 cites·14 claims
- 0657US8222161B2Substrate processing apparatus and semiconductor devices manufacturing methodYANAGISAWA YOSHIHIKO·Filed 2011·Granted Jul 17, 2012·0 cites·12 claims
- 0744US2014302687A1Substrate Processing Device, Method for Manufacturing Semiconductor Device, and VaporizerHITACHI INT ELECTRIC INC·Filed 2014·Application pending·0 cites
- 0843US2014235068A1Method of manufacturing semiconductor device, apparatus for manufacturing semiconductor device, and non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2014·Application pending·0 cites
- 0942US2003140853A1Substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2003·Application pending·0 cites
- 1036US2003037802A1Semiconductor treating apparatus and cleaning method of the sameHITACHI LTD·Filed 2002·Application pending·0 cites
- 1133US2016013053A1Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording MediumHITACHI INT ELECTRIC INC·Filed 2015·Application pending·0 cites
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