Inventor · disambiguated record
Gregory Bartlett
Also filed as: BARTLETT GREGORY · BARTLETT GREGORY M · BARTLETT GREGORY MICHAEL
9 granted patents·1 pending application·1,483 citations·filing 2005–2024
92Inventor score
Top patents by PatentIndex Score
10 records- 0196US10262859B2Process for forming a film on a substrate using multi-port injection assembliesASM IP HOLDING BV·Filed 2018·Granted Apr 16, 2019·413 cites·14 claims
- 0296US9892913B2Radial and thickness control via biased multi-port injection settingsASM IP HOLDING BV·Filed 2017·Granted Feb 13, 2018·464 cites·17 claims
- 0395US7648579B2Substrate support system for reduced autodoping and backside depositionASM INC·Filed 2005·Granted Jan 19, 2010·42 cites·30 claims
- 0492US9169975B2Systems and methods for mass flow controller verificationSARIN MICHAEL CHRISTOPHER·Filed 2012·Granted Oct 27, 2015·506 cites·34 claims
- 0592US8728239B2Methods and apparatus for a gas panel with constant gas flowBAUER MATTHIAS·Filed 2011·Granted May 20, 2014·16 cites·13 claims
- 0689US11053591B2Multi-port gas injection system and reactor system including sameASM IP HOLDING BV·Filed 2018·Granted Jul 6, 2021·4 cites·22 claims
- 0786US8088225B2Substrate support system for reduced autodoping and backside depositionGOODMAN MATT G·Filed 2009·Granted Jan 3, 2012·17 cites·13 claims
- 0886US8047706B2Calibration of temperature control system for semiconductor processing chamberASM INC·Filed 2008·Granted Nov 1, 2011·18 cites·28 claims
- 0977US8834955B2Methods and apparatus for a gas panel with constant gas flowASM INC·Filed 2014·Granted Sep 16, 2014·3 cites·10 claims
- 1058US2025207257A1Chamber arrangements including backpressure controllers, semiconductor processing systems including chamber arrangements, and methods of forming semiconductor structures using chamber arrangements having backpressure controllersASM IP HOLDING BV·Filed 2024·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →