Inventor · disambiguated record
Jin Yokogawa
Also filed as: YOKOGAWA JIN
3 granted patents·97 citations·filing 1999–2002
76Inventor score
Technology areasH10P
Files withKAWASAKI MICROELECTRONICS INC3
Top patents by PatentIndex Score
3 records- 0189US6558505B2Method and apparatus for processing semiconductor substratesKAWASAKI MICROELECTRONICS INC·Filed 2002·Granted May 6, 2003·41 cites·18 claims
- 0277US6547921B2Method and apparatus for processing semiconductor substratesKAWASAKI MICROELECTRONICS INC·Filed 2002·Granted Apr 15, 2003·17 cites·41 claims
- 0376US6447853B1Method and apparatus for processing semiconductor substratesKAWASAKI MICROELECTRONICS INC·Filed 1999·Granted Sep 10, 2002·39 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →