Inventor · disambiguated record

Egbert Vetter

Also filed as: VETTER EGBERT

2 granted patents·73 citations·filing 1994–1996

67Inventor score

Technology areasG01P Y10S

Files withLITEF GMBH2

Top patents by PatentIndex Score

2 records

0180US5614742AMicromechanical accelerometer with plate-like semiconductor wafersLITEF GMBH·Filed 1996·Granted Mar 25, 1997·47 cites·9 claims
0266US5504032AMicromechanical accelerometer and method of manufacture thereofLITEF GMBH·Filed 1994·Granted Apr 2, 1996·26 cites·13 claims

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