Inventor · disambiguated record
Moriaki Akazawa
Also filed as: AKAZAWA MORIAKI
13 granted patents·1 pending application·287 citations·filing 1988–2008
93Inventor score
Top patents by PatentIndex Score
14 records- 0191US5306671AMethod of treating semiconductor substrate surface and method of manufacturing semiconductor device including such treating methodMITSUBISHI ELECTRIC CORP·Filed 1991·Granted Apr 26, 1994·89 cites·12 claims
- 0279US4915979ASemiconductor wafer treating device utilizing ECR plasmaMITSUBISHI ELECTRIC CORP·Filed 1988·Granted Apr 10, 1990·24 cites·6 claims
- 0378US7927187B2Method of polishing a target surfaceNIPPON MICRO COATING KK·Filed 2008·Granted Apr 19, 2011·7 cites·8 claims
- 0475US6586329B1Semiconductor device and a method of manufacturing thereofMITSUBISHI ELECTRIC CORP·Filed 2000·Granted Jul 1, 2003·20 cites·41 claims
- 0575US5302541AManufacturing method of a semiconductor device with a trench capacitorMITSUBISHI ELECTRIC CORP·Filed 1993·Granted Apr 12, 1994·30 cites·8 claims
- 0674US4982138ASemiconductor wafer treating device utilizing a plasmaMITSUBISHI ELECTRIC CORP·Filed 1988·Granted Jan 1, 1991·19 cites·5 claims
- 0756US6097052ASemiconductor device and a method of manufacturing thereofMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Aug 1, 2000·19 cites·22 claims
- 0855US5474615AMethod for cleaning semiconductor devicesMITSUBISHI ELECTRIC CORP·Filed 1992·Granted Dec 12, 1995·25 cites·10 claims
- 0949US6603163B2Semiconductor device with capacitor and method of manufacturing thereofMITSUBISHI ELECTRIC CORP·Filed 2001·Granted Aug 5, 2003·4 cites·4 claims
- 1049US5223085APlasma etching method with enhanced anisotropic property and apparatus thereofMITSUBISHI ELECTRIC CORP·Filed 1991·Granted Jun 29, 1993·19 cites·9 claims
- 1148US5038013APlasma processing apparatus including an electromagnet with a bird cage coreMITSUBISHI ELECTRIC CORP·Filed 1990·Granted Aug 6, 1991·8 cites·7 claims
- 1244US5203981AVacuum-treatment apparatusMITSUBISHI ELECTRIC CORP·Filed 1992·Granted Apr 20, 1993·14 cites·6 claims
- 1343US5218218ASemiconductor device and manufacturing method thereofMITSUBISHI ELECTRIC CORP·Filed 1992·Granted Jun 8, 1993·9 cites·8 claims
- 1436US2003067053A1Semiconductor device with capacitor and method of manufacturing thereofMITSUBISHI ELECTRIC CORP·Filed 2002·Application pending·0 cites
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