Inventor · disambiguated record
Song Hwan Park
Also filed as: PARK SONG HWAN
3 granted patents·5 pending applications·5 citations·filing 2009–2022
53Inventor score
Top patents by PatentIndex Score
8 records- 0183US10392702B2Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Aug 27, 2019·5 cites·11 claims
- 0254US12392554B2Apparatus for processing a substrate and method of operating the sameSK HYNIX INC·Filed 2022·Granted Aug 19, 2025·0 cites·14 claims
- 0354US2011294284A1Method for depositing ultra fine grain polysilicon thin filmKIM HAI WON·Filed 2009·Application pending·0 cites
- 0443US2011136328A1Method for depositing ultra fine grain polysilicon thin filmKIM HAI WON·Filed 2009·Application pending·0 cites
- 0540US2020392619A1Apparatus and method of processing a substrateSK HYNIX INC·Filed 2019·Application pending·0 cites
- 0632US2018122638A1Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Application pending·0 cites
- 0730US9416451B2Substrate processing device equipped with semicircle shaped antennaJE SUNG TAE·Filed 2011·Granted Aug 16, 2016·0 cites·7 claims
- 0830US2013186337A1Substrate processing device for supplying reaction gas through symmetry-type inlet and outletJE SUNG TAE·Filed 2011·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →