Inventor · disambiguated record
Akihisa Ueno
Also filed as: UENO AKIHISA
4 granted patents·114 citations·filing 1998–2007
77Inventor score
Top patents by PatentIndex Score
4 records- 0186US6417093B1Process for planarization of metal-filled trenches of integrated circuit structures by forming a layer of planarizable material over the metal layer prior to planarizingLSI LOGIC CORP·Filed 2000·Granted Jul 9, 2002·52 cites·23 claims
- 0272US6503828B1Process for selective polishing of metal-filled trenches of integrated circuit structuresLSI LOGIC CORP·Filed 2001·Granted Jan 7, 2003·21 cites·31 claims
- 0367US6340434B1Method and apparatus for chemical-mechanical polishingLSI LOGIC CORP·Filed 1998·Granted Jan 22, 2002·41 cites·17 claims
- 0431US7656113B2Device of pulse width modulation type for load drivePANASONIC CORP·Filed 2007·Granted Feb 2, 2010·0 cites·3 claims
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