Inventor · disambiguated record
Christoph Petri
Also filed as: PETRI CHRISTOPH
5 granted patents·3 citations·filing 2016–2021
64Inventor score
Files withZEISS CARL SMT GMBH5
Top patents by PatentIndex Score
5 records- 0183US11415892B2Method for producing a reflecting optical element of a projection exposure apparatus and reflecting optical element for a projection exposure apparatus, projection lens and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2021·Granted Aug 16, 2022·2 cites·9 claims
- 0268US10209620B2Illumination system for EUV projection exposure apparatus, EUV projection exposure apparatus including illumination system and method for operating an EUV projection exposure apparatusZEISS CARL SMT GMBH·Filed 2018·Granted Feb 19, 2019·1 cites·20 claims
- 0361US11500294B2Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the methodZEISS CARL SMT GMBH·Filed 2021·Granted Nov 15, 2022·0 cites·14 claims
- 0444US9841685B2Determination of a corrected variableZEISS CARL SMT GMBH·Filed 2016·Granted Dec 12, 2017·0 cites·19 claims
- 0542US10859819B2Method for changing a surface via particle irradiationZEISS CARL SMT GMBH·Filed 2019·Granted Dec 8, 2020·0 cites·20 claims
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