Inventor · disambiguated record
Coen Van De Vin
Also filed as: VAN DE VIN COEN
2 granted patents·3 citations·filing 2004–2005
38Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0166US7355675B2Method for measuring information about a substrate, and a substrate for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Apr 8, 2008·3 cites·64 claims
- 0235US7209214B2Lithographic apparatus focus test method and system, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 24, 2007·0 cites·26 claims
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