Inventor · disambiguated record
Sanjay Lalbahadoersing
Also filed as: LALBAHADOERSING SANJAY
3 granted patents·26 citations·filing 2003–2007
71Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0188US7330261B2Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatusASML NETHERLANDS BV·Filed 2003·Granted Feb 12, 2008·19 cites·37 claims
- 0284US7619738B2Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatusASML NETHERLANDS BV·Filed 2007·Granted Nov 17, 2009·4 cites·25 claims
- 0366US7355675B2Method for measuring information about a substrate, and a substrate for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2005·Granted Apr 8, 2008·3 cites·64 claims
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