Inventor · disambiguated record
Donghyub Lee
Also filed as: LEE DONGHYUB
3 granted patents·1 citations·filing 2021–2022
46Inventor score
Files withSAMSUNG ELECTRONICS CO LTD3
Top patents by PatentIndex Score
3 records- 0180US11490499B2Method of exposure using extreme ultraviolet and method of manufacturing a semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Nov 1, 2022·1 cites·20 claims
- 0260US12487532B2EUV collector inspection apparatus and inspection methodSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Dec 2, 2025·0 cites·19 claims
- 0343US11940620B2Method of cleaning collector of EUV light source systemSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Mar 26, 2024·0 cites·20 claims
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