Inventor · disambiguated record
Kunimasa Matsushita
Also filed as: MATSUSHITA KUNIMASA
4 granted patents·5 pending applications·6 citations·filing 2012–2025
60Inventor score
Top patents by PatentIndex Score
9 records- 0179US9165799B2Substrate processing method and substrate processing unitWANG XINMING·Filed 2012·Granted Oct 20, 2015·6 cites·21 claims
- 0256US11911806B2Substrate cleaning device, abnormality determination method of substrate cleaning device, storage mediumEBARA CORP·Filed 2022·Granted Feb 27, 2024·0 cites·9 claims
- 0355US11267097B2Non-transitory computer-readable storage medium storing a program of stretching operation of elastic membrane, method of stretching operation of elastic membrane, and polishing apparatusEBARA CORP·Filed 2018·Granted Mar 8, 2022·0 cites·14 claims
- 0453US2025372411A1Substrate processing apparatus and recording mediaEBARA CORP·Filed 2025·Application pending·0 cites
- 0552US2024213061A1Semiconductor wafer detection device and droplet guide memberEBARA CORP·Filed 2023·Application pending·0 cites
- 0651US2021008684A1Substrate processing apparatus and storage mediumEBARA CORP·Filed 2020·Application pending·0 cites
- 0745US2020061774A1Method for determining polishing pad height and polishing systemEBARA CORP·Filed 2019·Application pending·0 cites
- 0836US2013000671A1Substrate cleaning methodWANG XINMING·Filed 2012·Application pending·0 cites
- 0933US9737973B2Substrate processing apparatusEBARA CORP·Filed 2015·Granted Aug 22, 2017·0 cites·10 claims
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