Inventor · disambiguated record
Steve Chervenak
Also filed as: CHERVENAK STEVE
2 granted patents·1 pending application·34 citations·filing 2003–2005
63Inventor score
Technology areasC23C
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0175US6837974B2Single piece pod shield for vertical plenum wafer processing machineTOKYO ELECTRON LTD·Filed 2003·Granted Jan 4, 2005·20 cites·20 claims
- 0272US6998033B2Sputtering cathode adapter assembly and methodTOKYO ELECTRON LTD·Filed 2003·Granted Feb 14, 2006·14 cites·44 claims
- 0352US2006032741A1Sputtering cathode adapter assembly and methodTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →