Inventor · disambiguated record

Dale Irwin

Also filed as: IRWIN DALE

2 granted patents·1 pending application·34 citations·filing 2003–2005

63Inventor score

Technology areasC23C

Files withTOKYO ELECTRON LTD3

Top patents by PatentIndex Score

3 records

0175US6837974B2Single piece pod shield for vertical plenum wafer processing machineTOKYO ELECTRON LTD·Filed 2003·Granted Jan 4, 2005·20 cites·20 claims
0272US6998033B2Sputtering cathode adapter assembly and methodTOKYO ELECTRON LTD·Filed 2003·Granted Feb 14, 2006·14 cites·44 claims
0352US2006032741A1Sputtering cathode adapter assembly and methodTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites

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