Inventor · disambiguated record
Je-Bum Yoon
Also filed as: YOON JE-BUM
1 granted patent·1 pending application·0 citations·filing 2007–2011
8Inventor score
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2 records- 0147US7723702B2E-beam lithography system for synchronously irradiating a plurality of photomasks and method of fabricating photomasks using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted May 25, 2010·0 cites·13 claims
- 0234US2011294074A1Exposure apparatus and exposing method using the apparatusLEE JI-EUN·Filed 2011·Application pending·0 cites
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