Inventor
SONTHALIA PRERNA
IN6 patents
⚠️ This page may combine multiple inventors who share the name “SONTHALIA PRERNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
3 patentsUSRE46427EJun 6, 2017
Antioxidants for post-CMP cleaning formulations
ADVANCED TECH MATERIALS2 citations71
US9528078B2Dec 27, 2016
Antioxidants for post-CMP cleaning formulations
ADVANCED TECH MATERIALS4 citations71
US9158203B2Oct 13, 2015
Compositions and methods for the selective removal of silicon nitride
ADVANCED TECH MATERIALS2 citations59