Inventor · disambiguated record

Michael Raum

Also filed as: RAUM MICHAEL

1 granted patent·0 citations·filing 2006–2006

11Inventor score

Technology areasG02B

Files withSOHMER ALEXANDER1

Top patents by PatentIndex Score

1 record

0134US8873151B2Illumination system for a microlithgraphic exposure apparatusSOHMER ALEXANDER·Filed 2006·Granted Oct 28, 2014·0 cites·25 claims

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