Inventor · disambiguated record
Jeff A. Bogart
Also filed as: BOGART JEFF · BOGART JEFF A
7 granted patents·174 citations·filing 1999–2016
85Inventor score
Top patents by PatentIndex Score
7 records- 0192US6344105B1Techniques for improving etch rate uniformityLAM RES CORP·Filed 1999·Granted Feb 5, 2002·141 cites·29 claims
- 0284US9076634B2Replaceable upper chamber parts of plasma processing apparatusBROWN DANIEL ARTHUR·Filed 2010·Granted Jul 7, 2015·9 cites·20 claims
- 0384US7928366B2Methods of and apparatus for accessing a process chamber using a dual zone gas injector with improved optical accessLAM RES CORP·Filed 2006·Granted Apr 19, 2011·7 cites·16 claims
- 0481US9865472B2Fabrication of a silicon structure and deep silicon etch with profile controlLAM RES CORP·Filed 2016·Granted Jan 9, 2018·3 cites·13 claims
- 0575US9330926B2Fabrication of a silicon structure and deep silicon etch with profile controlCHEBI ROBERT·Filed 2008·Granted May 3, 2016·7 cites·32 claims
- 0666US8524099B2Methods for accessing a process chamber using a dual zone gas injector with improved optical accessBOGART JEFF A·Filed 2011·Granted Sep 3, 2013·2 cites·15 claims
- 0755US7201829B2Mask plate designNOVELLUS SYSTEMS INC·Filed 2001·Granted Apr 10, 2007·5 cites·31 claims
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