Inventor · disambiguated record
Hans Erik Kattouw
Also filed as: KATTOUW HANS ERIK
4 granted patents·1 pending application·7 citations·filing 2006–2024
62Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV5
Top patents by PatentIndex Score
5 records- 0178US7502096B2Lithographic apparatus, calibration method, device manufacturing method and computer program productASML NETHERLANDS BV·Filed 2006·Granted Mar 10, 2009·7 cites·22 claims
- 0272US11599027B2Lithographic process and apparatus and inspection process and apparatusASML NETHERLANDS BV·Filed 2021·Granted Mar 7, 2023·0 cites·20 claims
- 0364US2024192610A1Method for modeling measurement data over a substrate area and associated apparatusesASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0458US11199782B2Lithographic process and apparatus and inspection process and apparatusASML NETHERLANDS BV·Filed 2017·Granted Dec 14, 2021·0 cites·20 claims
- 0553US12449735B2Sub-field control of a lithographic process and associated apparatusASML NETHERLANDS BV·Filed 2020·Granted Oct 21, 2025·0 cites·20 claims
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