Inventor · disambiguated record
Norio Akutsu
Also filed as: AKUTSU NORIO
3 granted patents·1 pending application·28 citations·filing 1980–2003
70Inventor score
Top patents by PatentIndex Score
4 records- 0171US6638860B2Method and apparatus for processing substrates and method for manufacturing a semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2001·Granted Oct 28, 2003·14 cites·19 claims
- 0254US6927165B2Method and apparatus for processing substrates and method for manufacturing a semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2003·Granted Aug 9, 2005·4 cites·17 claims
- 0344US4299023AMachine for winding and inserting coilsHITACHI LTD·Filed 1980·Granted Nov 10, 1981·10 cites·4 claims
- 0435US2002182870A1Substrate processing apparatus and a method for fabricating a semiconductor device by using sameHITACHI INT ELECTRIC INC·Filed 2002·Application pending·0 cites
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