Inventor · disambiguated record
Ivan Lalovic
Also filed as: LALOVIC IVAN · LALOVIC IVAN B · LALOVIĆ IVAN
25 granted patents·1 pending application·504 citations·filing 2001–2024
96Inventor score
Top patents by PatentIndex Score
26 records- 0197US7885309B2Laser systemCYMER INC·Filed 2007·Granted Feb 8, 2011·37 cites·23 claims
- 0297US6853653B2Laser spectral engineering for lithographic processCYMER INC·Filed 2001·Granted Feb 8, 2005·74 cites·32 claims
- 0397US6671294B2Laser spectral engineering for lithographic processCYMER INC·Filed 2001·Granted Dec 30, 2003·114 cites·11 claims
- 0496US11333649B2Hyperspectral sensing systemFLYING GYBE INC·Filed 2020·Granted May 17, 2022·4 cites·19 claims
- 0593US6984475B1Extreme ultraviolet (EUV) lithography masksADVANCED MICRO DEVICES INC·Filed 2003·Granted Jan 10, 2006·51 cites·20 claims
- 0692US8170078B2Laser systemERSHOV ALEXANDER I·Filed 2011·Granted May 1, 2012·11 cites·20 claims
- 0792US7999915B2Laser systemCYMER INC·Filed 2007·Granted Aug 16, 2011·15 cites·24 claims
- 0892US7087907B1Detection of contamination in imaging systems by fluorescence and/or absorption spectroscopyADVANCED MICRO DEVICES INC·Filed 2004·Granted Aug 8, 2006·46 cites·20 claims
- 0991US10794888B2Hyperspectral sensing systemFLYING GYBE INC·Filed 2019·Granted Oct 6, 2020·4 cites·19 claims
- 1091US9715180B2Wafer-based light source parameter controlCymer LLC·Filed 2014·Granted Jul 25, 2017·9 cites·30 claims
- 1188US6829040B1Lithography contrast enhancement technique by varying focus with wavelength modulationADVANCED MICRO DEVICES INC·Filed 2003·Granted Dec 7, 2004·32 cites·18 claims
- 1286US11073423B2Hyperspectral sensing system and processing methods for hyperspectral dataFLYING GYBE INC·Filed 2019·Granted Jul 27, 2021·3 cites·7 claims
- 1386US7081956B1Method and device for determining reflection lens pupil transmission distribution and illumination intensity distribution in reflective imaging systemADVANCED MICRO DEVICES INC·Filed 2003·Granted Jul 25, 2006·27 cites·20 claims
- 1486US7014966B2Method and apparatus for elimination of bubbles in immersion medium in immersion lithography systemsADVANCED MICRO DEVICES INC·Filed 2003·Granted Mar 21, 2006·29 cites·22 claims
- 1584US8520186B2Active spectral control of optical sourceSEONG NAKGEUON·Filed 2010·Granted Aug 27, 2013·11 cites·20 claims
- 1681US7382815B2Laser spectral engineering for lithographic processCYMER INC·Filed 2004·Granted Jun 3, 2008·14 cites·196 claims
- 1772US7139301B2Laser spectral engineering for lithographic processCYMER INC·Filed 2003·Granted Nov 21, 2006·9 cites·12 claims
- 1868US12072242B2Hyperspectral sensing system and processing methods for hyperspectral dataFLYING GYBE INC·Filed 2021·Granted Aug 27, 2024·0 cites·6 claims
- 1968US11221322B2Hyperspectral sensing systemFLYING GYBE INC·Filed 2020·Granted Jan 11, 2022·0 cites·11 claims
- 2066US9709897B2Polarization control of pulsed light beamCymer LLC·Filed 2015·Granted Jul 18, 2017·1 cites·23 claims
- 2166US6977717B1Method and device for determining projection lens pupil transmission distribution and illumination intensity distribution in photolithographic imaging systemADVANCED MICRO DEVICES INC·Filed 2003·Granted Dec 20, 2005·8 cites·20 claims
- 2262US7298770B2Laser spectral engineering for lithographic processCYMER INC·Filed 2004·Granted Nov 20, 2007·4 cites·58 claims
- 2360US2025020624A1Systems and methods for determining water quality parametersFLYING GYBE INC·Filed 2024·Application pending·0 cites
- 2453US10036960B2Wafer-based light source parameter controlCymer LLC·Filed 2017·Granted Jul 31, 2018·0 cites·25 claims
- 2552US11650190B2Hyperspectral sensing system and methodsFLYING GYBE INC·Filed 2020·Granted May 16, 2023·0 cites·20 claims
- 2646US7741012B1Method for removal of immersion lithography medium in immersion lithography processesADVANCED MICRO DEVICES INC·Filed 2004·Granted Jun 22, 2010·1 cites·20 claims
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