Inventor · disambiguated record
Franklin D. Kalk
Also filed as: KALK FRANKLIN · KALK FRANKLIN D · KALK FRANKLIN DEAN
18 granted patents·2 pending applications·458 citations·filing 1980–2007
95Inventor score
Top patents by PatentIndex Score
20 records- 0196US4381963AMicro fabrication molding processUNIV ROCHESTER·Filed 1980·Granted May 3, 1983·113 cites·18 claims
- 0290US6911283B1Method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanismDUPONT PHOTOMASKS INC·Filed 2002·Granted Jun 28, 2005·34 cites·32 claims
- 0390US6721695B1Method and apparatus for evaluating the runability of a photomask inspection toolDUPONT PHOTOMASKS INC·Filed 2001·Granted Apr 13, 2004·55 cites·10 claims
- 0489US6841312B1Method and apparatus for coupling a pellicle assembly to a photomaskDUPONT PHOTOMASKS INC·Filed 2002·Granted Jan 11, 2005·33 cites·23 claims
- 0588US6841309B1Damage resistant photomask constructionDUPONT PHOTOMASKS INC·Filed 2002·Granted Jan 11, 2005·45 cites·22 claims
- 0683US5415953APhotomask blanks comprising transmissive embedded phase shifterDU PONT·Filed 1994·Granted May 16, 1995·44 cites·15 claims
- 0781US4556968AUnconstrained removable protective cover for optical diskSTORAGE TECHNOLOGY PARTNERS·Filed 1983·Granted Dec 3, 1985·31 cites·2 claims
- 0876US6803158B1Photomask and method for forming an opaque border on the sameDUPONT PHOTOMASKS INC·Filed 2002·Granted Oct 12, 2004·15 cites·21 claims
- 0974US7271950B1Apparatus and method for optimizing a pellicle for off-axis transmission of lightTOPPAN PHOTOMASKS INC·Filed 2001·Granted Sep 18, 2007·14 cites·21 claims
- 1074US6780548B1Alternating aperture phase shifting photomask with improved transmission balancingDUPONT PHOTOMASKS INC·Filed 2002·Granted Aug 24, 2004·13 cites·24 claims
- 1174US6482557B1Method and apparatus for evaluating the runability of a photomask inspection toolDUPONT PHOTOMASKS INC·Filed 2000·Granted Nov 19, 2002·14 cites·12 claims
- 1272US6759171B1Alternating aperture phase shifting photomask with improved intensity balancingDUPONT PHOTOMASKS INC·Filed 2002·Granted Jul 6, 2004·11 cites·20 claims
- 1360US6803160B2Multi-tone photomask and method for manufacturing the sameDUPONT PHOTOMASKS INC·Filed 2002·Granted Oct 12, 2004·7 cites·25 claims
- 1453US4857373AOptical recording elementDU PONT·Filed 1987·Granted Aug 15, 1989·8 cites·12 claims
- 1552US4600682AOptical storage structureSTORAGE TECHNOLOGY CORP·Filed 1984·Granted Jul 15, 1986·7 cites·9 claims
- 1648US2006269851A1Photomask and method for conveying information associated with a photomask substrateFRISA LARRY E·Filed 2006·Application pending·0 cites
- 1747US5459002APhotomask blanksDU PONT·Filed 1994·Granted Oct 17, 1995·8 cites·8 claims
- 1845US4480302AOptical recording mediaSTORAGE TECHNOLOGY CORP·Filed 1982·Granted Oct 30, 1984·6 cites·12 claims
- 1943US2007160919A1Phase-Shift Mask Providing Balanced Light Intensity Through Different Phase-Shift Apertures And Method For Forming Such Phase-Shift MaskCHEN GONG·Filed 2007·Application pending·0 cites
- 2038US7056623B2Photomask and method for manufacturing the sameTOPPAN PHOTOMASKS INC·Filed 2003·Granted Jun 6, 2006·0 cites·23 claims
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