Inventor · disambiguated record
Hyo-Hoo Kim
Also filed as: KIM HYO-HOO
2 granted patents·14 citations·filing 2001–2001
55Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD2
Top patents by PatentIndex Score
2 records- 0165US6650408B2Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Nov 18, 2003·12 cites·19 claims
- 0245US6850332B2Method for measuring step difference in a semiconductor device and apparatus for performing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Feb 1, 2005·2 cites·12 claims
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