Inventor · disambiguated record
Jeffrey A. Chard
Also filed as: CHARD JEFFREY · CHARD JEFFREY A · CHARD JEFFREY ALEXANDER
9 granted patents·1 pending application·147 citations·filing 2000–2012
86Inventor score
Top patents by PatentIndex Score
10 records- 0196US6823230B1Tool path planning process for component by layered manufactureHONEYWELL INT INC·Filed 2000·Granted Nov 23, 2004·108 cites·63 claims
- 0283US7667858B2Automated process control using optical metrology and a correlation between profile models and key profile shape variablesTOKYO ELECTRON LTD·Filed 2007·Granted Feb 23, 2010·9 cites·26 claims
- 0378US7783669B2Data flow management in generating profile models used in optical metrologyTOKYO ELECTRON LTD·Filed 2006·Granted Aug 24, 2010·11 cites·17 claims
- 0476US7518740B2Evaluating a profile model to characterize a structure to be examined using optical metrologyTOKYO ELECTRON LTD·Filed 2006·Granted Apr 14, 2009·9 cites·20 claims
- 0575US9127927B2Techniques for optimized scatterometryILORETA JONATHAN·Filed 2012·Granted Sep 8, 2015·5 cites·40 claims
- 0675US7596422B2Determining one or more profile parameters of a structure using optical metrology and a correlation between profile models and key profile shape variablesTOKYO ELECTRON LTD·Filed 2007·Granted Sep 29, 2009·5 cites·23 claims
- 0746US7765234B2Data flow management in generating different signal formats used in optical metrologyTOKYO ELECTRON LTD·Filed 2006·Granted Jul 27, 2010·0 cites·26 claims
- 0846US2008013107A1Generating a profile model to characterize a structure to be examined using optical metrologyTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 0943US7469192B2Parallel profile determination for an optical metrology systemTOKYO ELECTRON LTD·Filed 2006·Granted Dec 23, 2008·0 cites·29 claims
- 1039US7515283B2Parallel profile determination in optical metrologyTOKYO ELECTRON LTD·Filed 2006·Granted Apr 7, 2009·0 cites·25 claims
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