Inventor · disambiguated record
Kisang Eum
Also filed as: EUM KISANG
5 granted patents·2 pending applications·2 citations·filing 2016–2022
62Inventor score
Files withSEMES CO LTD7
Top patents by PatentIndex Score
7 records- 0170US10529594B2Apparatus and method for treating substrateSEMES CO LTD·Filed 2017·Granted Jan 7, 2020·2 cites·23 claims
- 0249US12498174B2Substrate processing apparatusSEMES CO LTD·Filed 2022·Granted Dec 16, 2025·0 cites·20 claims
- 0347US12055866B2Cleaning jig, substrate treating apparatus including the same, cleaning method of substrate treating apparatusSEMES CO LTD·Filed 2021·Granted Aug 6, 2024·0 cites·17 claims
- 0447US2023201863A1Gas supply unit and substrate processing apparatus including sameSEMES CO LTD·Filed 2022·Application pending·0 cites
- 0546US2023207340A1Cleaning device and apparatus for processing a substrateSEMES CO LTD·Filed 2022·Application pending·0 cites
- 0641US10153137B2Support unit, substrate treating apparatus including the same, and method for treating a substrateSEMES CO LTD·Filed 2016·Granted Dec 11, 2018·0 cites·29 claims
- 0736US10930538B2Substrate alignment apparatus, substrate processing apparatus, and substrate processing methodSEMES CO LTD·Filed 2018·Granted Feb 23, 2021·0 cites·18 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →