Inventor · disambiguated record
James A. Seirmarco
Also filed as: SEIRMARCO JAMES A · SEIRMARCO JAMES ANTHONY
4 granted patents·302 citations·filing 1977–1997
83Inventor score
Top patents by PatentIndex Score
4 records- 0193US6083363AApparatus and method for uniform, low-damage anisotropic plasma processingTOKYO ELECTRON LTD·Filed 1997·Granted Jul 4, 2000·109 cites·21 claims
- 0292US5569363AInductively coupled plasma sputter chamber with conductive material sputtering capabilitiesSONY CORP·Filed 1994·Granted Oct 29, 1996·84 cites·27 claims
- 0390US4135097AIon implantation apparatus for controlling the surface potential of a target surfaceIBM·Filed 1977·Granted Jan 16, 1979·36 cites·6 claims
- 0475US5166856AElectrostatic chuck with diamond coatingIBM·Filed 1991·Granted Nov 24, 1992·73 cites·37 claims
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