Inventor · disambiguated record
Joachim Heinitz
Also filed as: HEINITZ JOACHIM
3 granted patents·160 citations·filing 2005–2009
74Inventor score
Top patents by PatentIndex Score
3 records- 0192US7741620B2Multi-beam modulator for a particle beam and use of the multi-beam modulator for the maskless structuring of a substrateVISTEC ELECTRON BEAM GMBH·Filed 2005·Granted Jun 22, 2010·135 cites·22 claims
- 0283US8148702B2Arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patternsDOERING HANS-JOACHIM·Filed 2009·Granted Apr 3, 2012·16 cites·22 claims
- 0379US7332730B2Device and method for imaging a multiple particle beam on a substrateLEICA MICROSYS LITHOGRAPHY LTD·Filed 2005·Granted Feb 19, 2008·9 cites·30 claims
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