Inventor · disambiguated record
Christopher K. Magg
Also filed as: MAGG CHRISTOPHER K · MAGG CHRISTOPHER KARL
8 granted patents·38 citations·filing 2001–2008
83Inventor score
Files withIBM8
Top patents by PatentIndex Score
8 records- 0176US6543617B2Packaged radiation sensitive coated workpiece process for making and method of storing sameIBM·Filed 2001·Granted Apr 8, 2003·16 cites·49 claims
- 0269US6989219B2Hardmask/barrier layer for dry etching chrome films and improving post develop resist profiles on photomasksIBM·Filed 2004·Granted Jan 24, 2006·9 cites·17 claims
- 0365US7742632B2Alternating phase shift mask inspection using biased inspection dataIBM·Filed 2006·Granted Jun 22, 2010·2 cites·17 claims
- 0463US6811959B2Hardmask/barrier layer for dry etching chrome films and improving post develop resist profiles on photomasksIBM·Filed 2002·Granted Nov 2, 2004·7 cites·6 claims
- 0557US7168224B2Method of making a packaged radiation sensitive resist film-coated workpieceIBM·Filed 2002·Granted Jan 30, 2007·4 cites·91 claims
- 0648US7619730B2Mask inspection DNIR replacement based on location of tri-tone level database images—2P shapesIBM·Filed 2008·Granted Nov 17, 2009·0 cites·6 claims
- 0741US7443497B2Mask inspection DNIR placement based on location of tri-tone level database images (2P shapes)IBM·Filed 2005·Granted Oct 28, 2008·0 cites·27 claims
- 0840US7494748B2Method for correction of defects in lithography masksIBM·Filed 2004·Granted Feb 24, 2009·0 cites·7 claims
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