Inventor · disambiguated record
Stephan Kellner
Also filed as: KELLNER STEPHAN
6 granted patents·10 citations·filing 2011–2019
75Inventor score
Top patents by PatentIndex Score
6 records- 0184US9280060B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2014·Granted Mar 8, 2016·5 cites·28 claims
- 0278US8873023B2Illumination system for microlithographySCHOLZ AXEL·Filed 2011·Granted Oct 28, 2014·4 cites·12 claims
- 0370US9606441B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2016·Granted Mar 28, 2017·1 cites·20 claims
- 0457US10088754B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2017·Granted Oct 2, 2018·0 cites·19 claims
- 0545US9448490B2EUV lithography systemZEISS CARL SMT GMBH·Filed 2013·Granted Sep 20, 2016·0 cites·19 claims
- 0643US11143075B2Exhaust gas aftertreatment system and method for exhaust gas aftertreatment in an internal combustion engineVOLKSWAGEN AG·Filed 2019·Granted Oct 12, 2021·0 cites·5 claims
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