Inventor · disambiguated record
Mirco Kern
Also filed as: KERN MIRCO
4 granted patents·10 citations·filing 2011–2017
70Inventor score
Technology areasG02B
Top patents by PatentIndex Score
4 records- 0184US9280060B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2014·Granted Mar 8, 2016·5 cites·28 claims
- 0278US8873023B2Illumination system for microlithographySCHOLZ AXEL·Filed 2011·Granted Oct 28, 2014·4 cites·12 claims
- 0370US9606441B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2016·Granted Mar 28, 2017·1 cites·20 claims
- 0457US10088754B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2017·Granted Oct 2, 2018·0 cites·19 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →