Inventor · disambiguated record
Phillip D. Matz
Also filed as: MATZ PHILLIP D · MATZ PHILLIP DANIEL
12 granted patents·5 pending applications·104 citations·filing 2003–2009
90Inventor score
Files withTEXAS INSTRUMENTS INC17
Top patents by PatentIndex Score
17 records- 0189US7189615B2Single mask MIM capacitor and resistor with in trench copper drift barrierTEXAS INSTRUMENTS INC·Filed 2005·Granted Mar 13, 2007·18 cites·19 claims
- 0284US6838300B2Chemical treatment of low-k dielectric filmsTEXAS INSTRUMENTS INC·Filed 2003·Granted Jan 4, 2005·34 cites·20 claims
- 0380US7642619B2Air gap in integrated circuit inductor fabricationTEXAS INSTRUMENTS INC·Filed 2009·Granted Jan 5, 2010·8 cites·19 claims
- 0475US7179747B2Use of supercritical fluid for low effective dielectric constant metallizationTEXAS INSTRUMENTS INC·Filed 2004·Granted Feb 20, 2007·17 cites·27 claims
- 0573US7566627B2Air gap in integrated circuit inductor fabricationTEXAS INSTRUMENTS INC·Filed 2007·Granted Jul 28, 2009·5 cites·16 claims
- 0671US7781884B2Method of fabrication of on-chip heat pipes and ancillary heat transfer componentsTEXAS INSTRUMENTS INC·Filed 2007·Granted Aug 24, 2010·5 cites·23 claims
- 0762US7485963B2Use of supercritical fluid for low effective dielectric constant metallizationTEXAS INSTRUMENTS INC·Filed 2006·Granted Feb 3, 2009·2 cites·24 claims
- 0861US7115467B2Metal insulator metal (MIM) capacitor fabrication with sidewall barrier removal aspectTEXAS INSTRUMENTS INC·Filed 2004·Granted Oct 3, 2006·9 cites·20 claims
- 0958US7727885B2Reduction of punch-thru defects in damascene processingTEXAS INSTRUMENTS INC·Filed 2006·Granted Jun 1, 2010·1 cites·23 claims
- 1056US7067441B2Damage-free resist removal process for ultra-low-k processingTEXAS INSTRUMENTS INC·Filed 2003·Granted Jun 27, 2006·5 cites·20 claims
- 1145US7732345B2Method for using a modified post-etch clean rinsing agentTEXAS INSTRUMENTS INC·Filed 2006·Granted Jun 8, 2010·0 cites·14 claims
- 1245US2010120242A1Method to prevent localized electrical open cu leads in vlsi cu interconnectsTEXAS INSTRUMENTS INC·Filed 2008·Application pending·0 cites
- 1340US7037823B2Method to reduce silanol and improve barrier properties in low k dielectric ic interconnectsTEXAS INSTRUMENTS INC·Filed 2004·Granted May 2, 2006·0 cites·14 claims
- 1440US2007184666A1Method for removing residue containing an embedded metalTEXAS INSTRUMENTS INC·Filed 2006·Application pending·0 cites
- 1540US2007080426A1Single lithography-step planar metal-insulator-metal capacitor and resistorTEXAS INSTRUMENTS INC·Filed 2005·Application pending·0 cites
- 1637US2005241672A1Extraction of impurities in a semiconductor process with a supercritical fluidTEXAS INSTRUMENTS INC·Filed 2004·Application pending·0 cites
- 1736US2004152296A1Hexamethyldisilazane treatment of low-k dielectric filmsTEXAS INSTRUMENTS INC·Filed 2003·Application pending·0 cites
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