Inventor · disambiguated record
Neil Benjamin
Also filed as: BENJAMIN NEIL · BENJAMIN NEIL M · BENJAMIN NEIL M P · BENJAMIN NEIL MARTIN PAUL
78 granted patents·6 pending applications·3,385 citations·filing 1996–2023
99Inventor score
Top patents by PatentIndex Score
84 records- 0199US7497614B2Apparatus for determining a temperature of a substrate and methods thereforLAM RES CORP·Filed 2007·Granted Mar 3, 2009·468 cites·25 claims
- 0299US6847014B1Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece supportLAM RES CORP·Filed 2002·Granted Jan 25, 2005·704 cites·23 claims
- 0398US8884194B2Heating plate with planar heater zones for semiconductor processingLAM RES CORP·Filed 2013·Granted Nov 11, 2014·52 cites·20 claims
- 0498US8637794B2Heating plate with planar heating zones for semiconductor processingSINGH HARMEET·Filed 2009·Granted Jan 28, 2014·86 cites·15 claims
- 0598US7274004B2Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece supportLAM RES CORP·Filed 2004·Granted Sep 25, 2007·170 cites·8 claims
- 0698US6920312B1RF generating system with fast loop controlLAM RES CORP·Filed 2002·Granted Jul 19, 2005·109 cites·51 claims
- 0797US5863376ATemperature controlling method and apparatus for a plasma processing chamberLAM RES CORP·Filed 1996·Granted Jan 26, 1999·281 cites·23 claims
- 0897US5820723AUniversal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate supportLAM RES CORP·Filed 1996·Granted Oct 13, 1998·434 cites·21 claims
- 0996US9673025B2Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and controlLAM RES CORP·Filed 2016·Granted Jun 6, 2017·10 cites·22 claims
- 1096US6483690B1Ceramic electrostatic chuck assembly and method of makingLAM RES CORP·Filed 2001·Granted Nov 19, 2002·155 cites·32 claims
- 1195US10403475B2Tunable multi-zone gas injection systemLAM RES CORP·Filed 2015·Granted Sep 3, 2019·13 cites·16 claims
- 1295US9392643B2Heating plate with planar heater zones for semiconductor processingLAM RES CORP·Filed 2013·Granted Jul 12, 2016·12 cites·21 claims
- 1395US8271121B2Methods and arrangements for in-situ process monitoring and control for plasma processing toolsVENUGOPAL VIJAYAKUMAR C·Filed 2010·Granted Sep 18, 2012·36 cites·20 claims
- 1494US10236193B2Substrate supports with multi-layer structure including independent operated heater zonesLAM RES CORP·Filed 2017·Granted Mar 19, 2019·6 cites·20 claims
- 1594US9775194B2Multiplexed heater array using AC drive for semiconductor processingLAM RES CORP·Filed 2016·Granted Sep 26, 2017·9 cites·19 claims
- 1693USRE47276ERF isolation for power circuitryLAM RES CORP·Filed 2016·Granted Mar 5, 2019·9 cites·17 claims
- 1793US8809747B2Current peak spreading schemes for multiplexed heated arrayPEASE JOHN·Filed 2012·Granted Aug 19, 2014·18 cites·10 claims
- 1892US12283462B2Control of plasma formation by RF coupling structuresLAM RES CORP·Filed 2021·Granted Apr 22, 2025·2 cites·31 claims
- 1992US10720346B2Substrate support with thermal zones for semiconductor processingLAM RES CORP·Filed 2016·Granted Jul 21, 2020·5 cites·25 claims
- 2092US10049948B2Power switching system for ESC with array of thermal control elementsLAM RES CORP·Filed 2012·Granted Aug 14, 2018·14 cites·19 claims
- 2192US9646861B2Heating plate with heating zones for substrate processing and method of use thereofLAM RES CORP·Filed 2013·Granted May 9, 2017·7 cites·25 claims
- 2292US9051647B2Tunable multi-zone gas injection systemCOOPERBERG DAVID J·Filed 2009·Granted Jun 9, 2015·36 cites·12 claims
- 2392US8692467B2Synchronized and shortened master-slave RF pulsing in a plasma processing chamberBENJAMIN NEIL MARTIN PAUL·Filed 2011·Granted Apr 8, 2014·17 cites·30 claims
- 2492US6344105B1Techniques for improving etch rate uniformityLAM RES CORP·Filed 1999·Granted Feb 5, 2002·141 cites·29 claims
- 2591US8528498B2Integrated steerability array arrangement for minimizing non-uniformityBENJAMIN NEIL·Filed 2008·Granted Sep 10, 2013·13 cites·19 claims
- 2689US6901808B1Capacitive manometer having reduced process driftLAM RES CORP·Filed 2003·Granted Jun 7, 2005·48 cites·26 claims
- 2789US6563076B1Voltage control sensor and control interface for radio frequency power regulation in a plasma reactorLAM RES CORP·Filed 2000·Granted May 13, 2003·30 cites·41 claims
- 2888US10014161B2Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and controlLAM RES CORP·Filed 2017·Granted Jul 3, 2018·3 cites·26 claims
- 2988US9824904B2Method and apparatus for controlling spatial temperature distributionLAM RES CORP·Filed 2015·Granted Nov 21, 2017·4 cites·18 claims
- 3088US6509542B1Voltage control sensor and control interface for radio frequency power regulation in a plasma reactorLAM RES CORP·Filed 2000·Granted Jan 21, 2003·28 cites·46 claims
- 3187US8963052B2Method for controlling spatial temperature distribution across a semiconductor waferBENJAMIN NEIL·Filed 2009·Granted Feb 24, 2015·9 cites·20 claims
- 3287US6653852B1Wafer integrated plasma probe assembly arrayLAM RES CORP·Filed 2000·Granted Nov 25, 2003·30 cites·12 claims
- 3387US6592710B1Apparatus for controlling the voltage applied to an electrostatic shield used in a plasma generatorLAM RES CORP·Filed 2001·Granted Jul 15, 2003·22 cites·28 claims
- 3486US8755204B2RF isolation for power circuitryBENJAMIN NEIL·Filed 2009·Granted Jun 17, 2014·20 cites·17 claims
- 3585US10276348B2Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing systemLAM RES CORP·Filed 2016·Granted Apr 30, 2019·3 cites·17 claims
- 3685US8991331B2Integrated steerability array arrangement for minimizing non-uniformity and methods thereofLAM RES CORP·Filed 2013·Granted Mar 31, 2015·2 cites·20 claims
- 3784US7080941B1Temperature sensing system for temperature measurement in a high radio frequency environmentLAM RES CORP·Filed 2002·Granted Jul 25, 2006·43 cites·44 claims
- 3883US6974550B2Apparatus and method for controlling the voltage applied to an electrostatic shield used in a plasma generatorLAM RES CORP·Filed 2003·Granted Dec 13, 2005·15 cites·10 claims
- 3982US10192767B2Ceramic electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and controlLAM RES CORP·Filed 2018·Granted Jan 29, 2019·2 cites·20 claims
- 4082US5708250AVoltage controller for electrostatic chuck of vacuum plasma processorsLAM RESARCH CORP·Filed 1996·Granted Jan 13, 1998·82 cites·21 claims
- 4180US9767996B2Application of powered electrostatic faraday shield to recondition dielectric window in ICP plasmasLAM RES CORP·Filed 2015·Granted Sep 19, 2017·3 cites·17 claims
- 4280US8921740B2Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece supportLAM RES CORP·Filed 2013·Granted Dec 30, 2014·3 cites·13 claims
- 4380US6821378B1Pump baffle and screen to improve etch uniformityLAM RES CORP·Filed 2002·Granted Nov 23, 2004·17 cites·21 claims
- 4479US10079168B2Ceramic electrostatic chuck including embedded Faraday cage for RF delivery and associated methods for operation, monitoring, and controlLAM RES CORP·Filed 2017·Granted Sep 18, 2018·2 cites·20 claims
- 4578US8736175B2Current control in plasma processing systemsLONG MAOLIN·Filed 2010·Granted May 27, 2014·4 cites·21 claims
- 4678US6781393B2Methods relating to wafer integrated plasma probe assembly arraysLAM RES CORP·Filed 2003·Granted Aug 24, 2004·15 cites·20 claims
- 4777US10475623B2Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methodsLAM RES CORP·Filed 2017·Granted Nov 12, 2019·1 cites·18 claims
- 4877US7802917B2Method and apparatus for chuck thermal calibrationLAM RES CORP·Filed 2005·Granted Sep 28, 2010·4 cites·9 claims
- 4977US7152011B2Smart component-based management techniques in a substrate processing systemLAM RES CORP·Filed 2004·Granted Dec 19, 2006·9 cites·49 claims
- 5076US10896808B2Maintenance mode power supply systemLAM RES CORP·Filed 2018·Granted Jan 19, 2021·2 cites·20 claims
Showing the top 50 of 84 patent records by PatentIndex Score.
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