Inventor · disambiguated record

Huai-Yu Hsiao

Also filed as: HSIAO HUAI-YU

2 granted patents·5 citations·filing 2015–2017

51Inventor score

Technology areasH10P

Files withLAM RES CORP2

Top patents by PatentIndex Score

2 records

0178US9633867B2Method and apparatus for anisotropic tungsten etchingLAM RES CORP·Filed 2015·Granted Apr 25, 2017·3 cites·19 claims
0275US10354888B2Method and apparatus for anisotropic tungsten etchingLAM RES CORP·Filed 2017·Granted Jul 16, 2019·2 cites·13 claims

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