Inventor · disambiguated record
William P. Inhofer
Also filed as: INHOFER WILLIAM · INHOFER WILLIAM P
6 granted patents·54 citations·filing 1999–2019
78Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0181US10910253B2Magnetically levitated and rotated chuck for processing microelectronic substrates in a process chamberTEL FSI INC·Filed 2017·Granted Feb 2, 2021·5 cites·17 claims
- 0280US9831107B2Processing system and method for providing a heated etching solutionTEL FSI INC·Filed 2014·Granted Nov 28, 2017·4 cites·13 claims
- 0376US11545387B2Magnetic integrated lift pin system for a chemical processing chamberTEL FSI INC·Filed 2019·Granted Jan 3, 2023·2 cites·17 claims
- 0470US6251195B1Method for transferring a microelectronic device to and from a processing chamberFSI INT INC·Filed 1999·Granted Jun 26, 2001·43 cites·22 claims
- 0551US9911631B2Processing system and method for providing a heated etching solutionTEL FSI INC·Filed 2014·Granted Mar 6, 2018·0 cites·20 claims
- 0624US9982664B2Systems and methods for metering a dose volume of fluid used to treat microelectronic substratesTEL FSI INC·Filed 2015·Granted May 29, 2018·0 cites·16 claims
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